CMP---Alumina

Alumina, with its advantages of high hardness and good stability, has been widely used in industrial applications such as precision machining and manufacturing, especially in chemical mechanical polishing (CMP), which has attracted extensive attention from scholars at home and abroad. Spherical alumina is not easy to produce fine scratches on the polishing surface and becomes the main raw material of CMP abrasives.

The surface modification of nano alumina can improve the particle surface regularity, reduce polishing scratches and pits, and improve the dispersion of alumina abrasive and the stability of polishing fluid.

The common treatment method is to use coupling agent, organic matter, inorganic substance and so on to coat a layer of soft material on the surface of alumina particles with high hardness to reduce polishing scratches and pits and other defects, and then improve the stability and dispersion of alumina polishing fluid, and can effectively improve the abrasion resistance of polishing abrasive.